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Thin Film Evaporation

Thin Film Evaporation

Evaporation is the process by which materials are heated until they achieve sufficient vapor pressure to produce a condensation rate that is economically feasible. Heat can be derived from a hot filament, an induction coil, an electron beam or a laser. Materials either evaporate (hence the name) or sublimate.

Typically performed at elevated temperatures under vacuum conditions. Atoms have meV of energy. Can be aided by external Ion sources for Ion Assisted Deposition (IAD) In IAD energy is added to the growing films through momentum transfer from a Beam of ions. Can be reactive. Materials available from UV(200 nm) to LWIR(50µm) diameters up to 22” weigh up to 105 lbs.

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