Crucible Liners
Thin Film Depositions Materials - PVD Products
Crucible Liners
Materion Microelectronics & Services crucible liners are manufactured to enhance evaporation performance, tool uptime and protect hearth pockets. The data below reviews our standard crucible liner materials and dimensions. If other materials or sizes are required, please contact a Materion Microelectronics & Services sales representative for further information.
Crucible Liner Dimensions (Inches)Size
| Size |
A |
B |
C |
D |
| 7cc |
1.167 |
Ref. |
0.563 |
0.093 |
| 15cc |
1.480 |
Ref. |
0.670 |
0.125 |
| 25cc |
1.850 |
Ref. |
0.680 |
0.093 |
| 40cc |
2.000 |
Ref. |
1.062 |
0.250 |
Common Crucible Liner Materials
- Al2O3
- Carbon/Graphite
- Copper
- Molybdenum
- PT - Graphite *
- Tantalum
- Tungsten
*PT - Graphite is a substitute for vitreous carbon, glassy carbon and/or pyrolytic graphite.
Crucible Liners
In some applications a "pre-coniditioning" of the crucible liner has positive effect on thin film properties and process yield. Materion offers this process as a service.
Contact Materion Microelectronics and Services
To learn more about Crucible Liners and how it can help your evaporation process by contacting Materion Microelectronics and Services.