Shield Cleaning and Chamber Services
Materion Microelectronics and Services shield kit and precision parts group has developed leading-edge technologies for removal of various complex and challenging process depositions and contamination from an array of substrates, including metals, ceramics, quartz, carbon fibre and plastics.
Due to our experience working with pioneering technology companies, we have access to the latest technology advancements in the cleaning industry. This state-of-the-art product, process and equipment information is shared with customers like you to identify cost efficiencies and process optimizations.
Key Technologies
Materion Microelectronics and Services shield kit and precision parts group has developed leading-edge technologies for removal of various complex and challenging process depositions and contamination from an array of substrates, including metals, ceramics, quartz, carbon fibre and plastics.
Due to our experience working with pioneering technology companies, we have access to the latest technology advancements in the cleaning industry. This state-of-the-art product, process and equipment information is shared with customers like you to identify cost efficiencies and process optimizations.
Chemical Treatment
Nonaggressive Chemical Treatment is a process involving the selective wet etching of unwanted deposition materials, such as metals, from a variety of substrates.
Parts are placed in proprietary chemical solutions of acids, bases, or alternative chemicals to remove process by-products (depositions) while ensuring the integrity
of the original substrate materials. Chemically treated parts are systematically rinsed with Ultra Pure Water and thoroughly dried with oil-free compressed dry air.
Surface Treatment
Materion Microelectronics and Services offers a diverse range of surface treatment technologies designed to ensure prolonged shield chamber life, increased process tool uptime, and reduced chamber particulates.
In contrast to most alternative parts cleaning companies, Materion does not recommend the use of aggressive mechanical techniques to remove process depositions. Instead, we recommend using mechanical surface treatments to final condition the surface of shield chamber parts. This leads to a reduced overall cost of ownership for parts replacement.
Advanced Surface Coating
Materion Microelectronics and Services has the proprietary capability to perform advanced surface coating using a variety of materials. Twin Wire Arc Spray coatings involve the use of a torch to heat a material in wire form to a molten state, and then an inert gas propels the material toward the part to be coated. This creates a completely new surface coating. The preferred advanced coating of choice is aluminium, but other metals and alloys such as titanium, copper, and stainless steel can be applied to the surface of any cleaned part (deposition removed). This helps increase the roughness of selective areas on the part.
Arc spray coatings are used primarily to increase the process lifetime of shielding used within particulate-sensitive processes (for example, tungsten, tantalum, chromium). The new surface coating increases the part’s adhesion properties, therefore minimizing chamber particulate generation and allowing for greater thicknesses of depositions to be applied to the part’s surface.
The arc spray coating layer can also be used to aid cleaning and promote increased recycling of shielding over a period of time. We introduce a new material "under layer" that can be removed relatively easily compared to more inert depositions.
Customer benefits include:
- Increased Process Chamber Life, Maximizing Tool Uptime
- Improved Chamber Particle Performance
- Improved Shield Life, Resulting in Lower Consumable Costs
- Substantial Cost Advantage through a Lower Cost of Ownership (CoO)
- Reduced Chemical Usage, Preserving the Environment
Final Cleaning and Parts Conditioning
Residuals such as particulates, ionics, and organics are removed by cleaning the parts to Ultra High Vacuum (UHV) standards, using a variety of techniques such as pressure washing and ultrasonic cleaning in Ultra Pure Water. This ensures that parts are contamination-free and ready for installation into the UHV environment.
Final cleaning to UHV cleanliness standards is conducted in a class 100/1000 cleanroom environment. Parts are given a final Ultrasonic Clean and rinse before being baked dry and outgassed in high-temperature ovens. Parts are then inspected and vacuum-packed.
Specialized packaging materials can be used to guarantee the final cleanliness of the part during transit and storage.
Final cleaning and conditioning techniques deliver enhanced process lifetime to the shields by improving part performance, increasing part cleanliness, and reducing process chamber particle generation. eSERVICES’s cleaning technologies are optimized to deliver increased shield/part lifetime, reducing the cost of your spare inventory.
Inspections & Tests
To ensure complete product cleanliness and maximize process repeatability, Materion Microelectronics and Services performs a variety of precision shield kit part inspections and tests. These include surface particle detection, surface profile verification, and a number of critical dimension and visual inspection tests. We also perform a number of part and assembly leak (vacuum and pressure) tests to minimize premature failures of assemblies once they are returned to you.
Materion Microelectronics and Services provides the following testing capabilities:
- Atomic Absorption/Emission Analysis
- Ion Chromatography Analysis
- Particle Analysis
- Nonvolatile Residue Analysis
- EDAX
- ToF-SIMS
- XPS
- SEM
- FT-IR
- GDMS
Organic, inorganic, and trace level elements are monitored on shield kit component parts to establish and achieve specification limits. These techniques are applied to determine contamination levels in the process/surface treatments.
Note: We also provide scientific technical support in Materials Testing, Materials Validation, and Failure Analysis.
On-Site Support
Our on-site cleaning and technical support includes complete shield kit and precision parts inventory management. Materion Microelectronics and Services’s on-site managed inventory programs reduce your costs and offer key benefits:
- Complete parts management throughout the supply chain
- Reduced inventory stock levels
- Better understanding and identification of recycling-related issues
- Enhanced traceability and tracking of parts and consumables
- Improvements in associated cost visibility through the introduction of forecasting
- Identification of ongoing cost-saving areas
- Reduction of technician and machine downtime
The role of an on-site coordinator can vary, but includes the following services:
Logistical Service Support
- Receive and inspect customer shield kit and parts in accordance with ISO 9002 Quality System
- Prepare relevant documentation to allow precision cleaning processing of the product
- First-level verification of defective parts at a customer’s site
- Complete administration logs and ensure that customer-supplied paperwork is relevant, complete, and accurate
- Visually inspect parts on receipt to determine whether the product is fit for processing
- Manage the logistics supply chains for goods delivery and receipt
Supply Chain Management
- Track client parts door to door
- Maintain and update a database system of all parts sent/returned
- Track the life cycle of all parts and recommend process and procedural improvements
- Advise client of discrepancies and or damaged parts
- Manage and control parts during quarantine, repair or refurbishment
- Manage customer’s shield kit and precision parts inventory to ensure optimum stock levels and production continuity
Total Account Management
- On-site client account contact and liaison officer
- Publish quality performance reports against key performance indicators, attend weekly meetings with customer to address all issues related parts cleaned
- Manage the administrative and commercial activity associated with the customer, including PO management, invoicing, etc.
- Assist in the investigation and rectification of associated noncompliance, customer complaints, audits, etc.
- Understand and apply related Six Sigma Projects: Cost Savings, Process Improvements, etc.
- Initiate and drive internal cost-saving projects; provide immediate and direct technical support
Contact Us
For additional information, contact Materion Microelectronics and Services today.
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