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Copper Parts Cleaning

Shield Cleaning Services for Custom Vacuum Chamber Parts

Materion’s unique cleaning process chemically removes copper deposition materials and any surface contamination without the use of aggressive mechanical processes. This approach results in minimal damage and extends the component's useful life.

Shield cleaning services provide advantages such as:

  • Extend life of shields
  • Lower costs of ownership
  • Higher metal returns
  • Support mass balance
  • Copper parts and regular shields included in same order

Capabilities & Key Technologies include:

  • Custom chamber parts cleaning
  • Production-ready final cleaning
  • Custom chemical cleaning per deposition and/or substrate material
  • Removal of precious and non-precious metals including Au, Ti, Ni, Cu, Pt or other challenging depositions
  • Custom surface treatments and texturization available
  • Semiconductor level Clean Room