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GETTER COMBO-LIDS™ - COMBINING GETTER TECHNOLOGY WITH COVER LID

For high reliability applications, certain GaAs electronic devices, MEMS devices and other sensitive sensors must be hermetically packaged with a sealed cavity completely free of hydrogen or all gases. Hydrogen degrades the long term reliability of GaAs devices.  Many MEMS devices require vacuum for proper performance.

INNOVATIVE SOLUTION TO ENTRAPPED GASES 

Materion addresses the problem of gas within a sealed package with its Getter Combo-Lid™. This product is a combination of a Combo-Lid (which is comprised of a ceramic or metal lid with a AuSn solder frame tack-welded to it) enhanced with a getter appropriate to the application. 

TWO OPTIONS:

For gettering hydrogen:

  • Materion can weld a getter foil to the ceiling of the metal lid. This foil will getter hydrogen, but is not affected by the nitrogen ambient used to reflow the AuSn solder during lid sealing.

For gettering all gases (except noble gases):

  • A thin film NanoGetter® is deposited onto the ceiling of a metal or ceramic lid. NanoGetter® is activated during reflow of AuSn to seal the lid. A Combo-Lid™ enhanced with NanoGetter® should be sealed in an ambient of vacuum or argon. When sealed in vacuum, NanoGetter® can preserve the vacuum in the sealed cavity.

NOTEWORTHY ADVANTAGES OF GETTER COMBO-LIDS™

An innovative product from an established technology leader in thin film solutions.

  • Superior protection for electronic devices
  • NanoGetter® removes all gases (except noble gases) to create a vacuum
  • Hydrogen getters compatible with standard AuSn sealing ambient (like nitrogen)
  • Compatible with MEMS and GaAs devices
  • ISO 9001:2008, ITAR compliant available
  • Longer-term vacuum stability

LEADING THE INDUSTRY IN COVER PRODUCTS 

Materion is already an established technology leader in hermetic cover lids for high reliability performance in a wide range of applications. Getter Combo-Lids™ can be used for multiple products including: GaAs electronic devices, MEMS devices, chemical sensors, IR detectors, accelerometers & gyroscopes, bolometers, resonators, pressure & flow sensors and more.

Contact us today for more information on Getter Combo-Lids™ and other Materion microelectronic packaging products.