Laser Ablation of Deposited Coatings
- Ablation of metal or dielectric thin films
- Coating line widths down to 20 µm
- Gaps between lines down to 20 µm
- Workpiece size up to 21” x 24”(533mm x 610 mm)
Laser ablated thin film Au on a 1” Si wafer; gold lines down to 20 µm wide