SILVER-FILLED PASTE PROVIDES SUPERIOR TARGET BONDING
Sputtering operations place higher demands on the bond between target and plate. Materion addresses these needs with its Thermotech TE Vacuum Paste, a silver-filled paste that is an electrically conductive high-vacuum compound specifically manufactured for bonding sputtering targets. It combines excellent thermal and electrical properties with a low vapor pressure sealant that will withstand the high vacuum operating temperature ranges.
DC SPUTTERING OPERATIONS COMPATIBLE AND OTHER ADVANTAGES
Thermotech TE Vacuum Paste is a unique target sealant that has good electrical conductivity making it compatible with Direct Current (DC) sputtering operations and offers the following benefits:
- Provides substantially better bonding and target cooling
- Does not contain silicone and is non-hardening
- Withstands higher operating temperature ranges
- Absorbs grease and other impurities on metal surfaces
- Cleans up easily and completely with acetone or methanol
- Available in single-use kits based on target size
TECHNICAL PROPERTIES OF THERMOTECH TE VACUUM PASTE
When our silver-filled paste is applied, it flows into small scratches and surface imperfections of the sputtering target and its cooling plate. This creates a smooth, level surface that allows for superior bonding to occur. The technical properties of Thermotech TE Vacuum Paste are listed in the chart below.
Property |
Value |
Operating Temperature Range |
10OC to 160OC |
Vapor Pressure @ 20OC |
2 x 10-9 Torr |
Density |
1.97 g/cc |
Color |
Gray |
Learn more from Materion Engineers about our unique silver-filled paste and how Thermotech TE Vacuum Paste can enhance target bonding in your sputtering operation.