Site Search
+1 800.327.1355

SILVER-FILLED PASTE PROVIDES SUPERIOR TARGET BONDING


Sputtering operations place higher demands on the bond between target and plate. Materion addresses these needs with its Thermotech TE Vacuum Paste, a silver-filled paste that is an electrically conductive high-vacuum compound specifically manufactured for bonding sputtering targets. It combines excellent thermal and electrical properties with a low vapor pressure sealant that will withstand the high vacuum operating temperature ranges.

DC SPUTTERING OPERATIONS COMPATIBLE AND OTHER ADVANTAGES

Thermotech TE Vacuum Paste is a unique target sealant that has good electrical conductivity making it compatible with Direct Current (DC) sputtering operations and offers the following benefits:

  • Provides substantially better bonding and target cooling
  • Does not contain silicone and is non-hardening
  • Withstands higher operating temperature ranges
  • Absorbs grease and other impurities on metal surfaces
  • Cleans up easily and completely with acetone or methanol
  • Available in single-use kits based on target size

TECHNICAL PROPERTIES OF THERMOTECH TE VACUUM PASTE

When our silver-filled paste is applied, it flows into small scratches and surface imperfections of the sputtering target and its cooling plate. This creates a smooth, level surface that allows for superior bonding to occur. The technical properties of Thermotech TE Vacuum Paste are listed in the chart below.

Property

Value

Operating Temperature Range

10OC to 160OC

Vapor Pressure @ 20OC

2 x 10-9 Torr

Density

1.97 g/cc

Color

Gray

Learn more from Materion Engineers about our unique silver-filled paste and how Thermotech TE Vacuum Paste can enhance target bonding in your sputtering operation.