Site Search
+1 800.327.1355

PROVIDING RELIABLE MATERIALS FOR THE MEMS MARKET

With the global proliferation of electronic devices for commercial and consumer uses, the need for MEMS (microelectromechanical) systems continues to grow. One of the basic building blocks for MEMS is the materials used to create integrated circuits. Materion offers precious and non-precious materials that deliver increased performance and functionality for applications ranging from air bags to laptops.

We understand how critical it is for materials to have higher purities than those currently available.

MATERIAL SOLUTIONS FOR THE NEXT GENERATION OF MEMS DEVICES

Materion has extensive expertise in materials specifically developed for complex semiconductor processes. We produce customized products that are highly engineered in order to meet exacting film characteristics and uniformities required for MEMS applications. Through the physical vapor deposition (PVD) process, our alloys and compounds sputter thin films on substrates of MEMS components that increase their reliability.

AVAILABLE THIN FILM DEPOSITION MATERIALS

Our R&D team has developed hundreds of new alloys and compounds for the MEMS, semiconductor and memory industries:

SPUTTERING TARGETS

Precious Metal

  • Au, Ag, Pt, Pd, Ru, Rh, Os, Ir
  • Custom & Innovative Alloys 

Non-precious Metal

  • Cr, Ti, Ta, Cu, Al, Ni
  • Custom Alloys

Sputtering Targets with Customized Chemistries such as PZT

  • Magnetic Materials
  • NiFe, CoNi, NiPt, FePt

Available Forms

  • Custom Size Planar & Rotary Targets
  • Support all OEM Platforms
  • Extended Life Designs

EVAPORATION MATERIALS

Precious Metals

  • Au, Ag, Pt, Pd

Non-precious Metals

  • Cr, Ti, Ta, Cu, Al, Ni

EVAPro Grade High Performance Materials

Custom & Select Alloys

Customizable Purity Levels Up to 5N

Available Forms

  • Pellets, Slugs, Starter Charges & More

SUPPLYING ADVANCED MATERIALS FOR MEMS APPLICATIONS

MEMS allows for very small electronics to be possible. There is a growth market for MEMS including such diverse applications as in: automotive - accelerometers, tire sensors, air bag deployment, gyroscopes, electronic stability control; in consumer devices - game controllers, personal media players, smart phones, digital cameras; in portable devices - microphones telephones, head sets, laptops, wearable devices; in home - smart sensors and control systems; in health - blood pressure sensors, chemosensors, biosensors; and in other fields such as Displays.

MATERION OFFERS SPECIALIZED MEMS EXPERTISE AND SUPPORT

All MEMS devices include materials that must meet customer requirements for purity and chemistry, deposition properties and consistency, quality, reliability and cleanliness. Materion engineers and scientists are dedicated to developing customized materials and alloys that contribute to the success of MEMS devices.

Contact our team today to learn more about how Materion can help with materials specifically developed for complex MEMS and semiconductor processes.