NANOGETTERS™ TECHNOLOGY ENHANCES VACUUM PACKAGING OF MEMS DEVICES

NanoGetters™ is a thin film getter solution that uses proprietary materials and processes to eliminate the problem of stray gases trapped within MEMS device packaging. Materion's patented getter technology is particle free and offers a better alternative to traditional non-evaporative getter technology.

ONE STOP SOLUTION FOR WAFER LEVEL PACKAGING

Materion has taken an integrated approach to the manufacturing of cap wafers for the wafer level packaging (WLP) of optical sensing devices. Materion can now provide optical coatings, solderable metalization and getter technology under one roof. This provides customers with an all-inclusive, turnkey service that was previously unavailable in the marketplace:

Efficiencies gained working with single source provider
Consistency in processes and product quality
Yields contained to one supplier
Cost Effective
Simplified Supply Chain
Reduced Lead Times
Technical staff support for design assistance

GETTER TECHNOLOGY THAT EXCEEDS EXPECTATIONS

Nanogetters™ technology is used to improve vacuum packaging in a wide range of applications including microbolometers, chemical sensors, microfluidic devices and other electronic devices. NanoGetters™ materials are applied to a surface inside the vacuum cavity of the MEMS device. After vacuum sealing, it can absorb remaining gases that were trapped or desorbed from the walls of the package. This innovative technology represents a major advancement in vacuum packaging reliability:

Wafer-level, high vacuum (<1mtorr)>
Longer-term vacuum stability
High yield
Superior cleanliness
Compatibility with all MEMS technologies: polysilicon surface, bulk, silicon-on glass and LIGA micromachining technologies

LEADING THE INDUSTRY WITH A COMMITMENT TO EXCELLENCE

Materion has an established history as a technology leader and go-to supplier of precision optical filters and innovative thin film solutions for the most demanding applications. The addition of NanoGetters™ continues our pursuit of leading-edge technologies to serve our customers.